Industrial Equipment
Semiconductor Lithography
A lineup of Semiconductor Lithography Equipment designed to meet the technical requirements of a wide range of applications in addition to traditional semiconductor wafer processing.
Flat Panel Display Lithography
A lineup of Lithography Equipment for array process, colour filter process and touch panel process and continues to support MPAsp series Flat Panel Display equipment by developing new functions & panel exposure productivity improvements.
Disk PVD Equipment
Sputtering equipment that supports mass production and next generation development of magnetic disks.
Semiconductor Sputter / Dry Etch
Vacuum application products, such as sputtering equipment, etching equipment, bonding equipment, and annealing equipment.
Atomic Diffusion Bonding Equipment
Ultra-high vacuum in-situ processes of wafer transfer, film deposition, bonding and bonded wafer collection with automatic operation.
Non-Contact Displacement Sensor
Measure the velocity and length without contacting moving target to prevent staining and damaging with high-speed up to 100 G of acceleration and features a depth detection range of ±15 mm.
Vacuum Components
Canon ANELVA's vacuum components are used by many companies and R&D laboratories engaged in thin film manufacturing as indispensable parts.
- Vacuum Pumps
- Quadrupole Mass Spectrometers
- Vacuum Gauges
- Helium Leak Detectors
- Vacuum Valves and Switches
- X-ray Sources
