Disk PVD Equipment
Disk PVD Equipment

Disk PVD Equipment

Disk PVD Equipment

Semiconductor Device Manufacturing

Canon manufactures reliable PVD equipment for 300 mm and 200 mm wafer processing. These products find applications in many areas of semiconductor manufacturing, such as MRAM stack deposition, metal gate deposition in gate-first process flow, metal wiring material deposition for semiconductor memory, formation of UBM films for wafer packaging, metal deposition for interconnect process and several others.

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Key Features

ML3000 is an in-line sputtering system for HDD media, featuring high-speed transfer, high deposition rates, and scalable configurations to meet various production volumes.

It supports both mass production and next-generation magnetic disk development.

Application

Mass production and next generation development of hard disks (magnetic disks).

Features

  • High productivity and excellent expandability
  • Provides high temperature heating and cooling unit for the development of HAMR
    HAMR: Heat-Assisted Magnetic Recording

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  • 03. Prices above are recommended retail price in SGD and may change without prior notice.