Vacuum Pumps
Quadrupole Mass Spectrometers
Vacuum Gauges
Helium Leak Detectors
Piping Parts/Ancillary Materials
Valves
Feed Throughs
X-ray Source
Vacuum Pumps
Canon Anelva provides a variety of pumps, including world's highest energy efficient cryopumps, ion pumps and titanium sublimation pumps, for low vacuum to ultra-high vacuum applications.
- Roots Type MU Series for Light Process
- Roots Type Dry Pump MU100N/300
- Foreline Trap
- POWER Eco Series Cryo Pump
- POWER Series Cryo Pump
- Combination Pump
- Ion Pump/Noble Pump
Quadrupole Mass Spectrometers
Canon Anelva offers several models of Quadrupole Mass Spectrometers, each tailored for specific applications, such as residual gas monitoring, process gas analysis, and high-speed mass measurement.
They are widely used in analysis of gases in thin film processing equipment, furnaces and accelerators.
- Process Gas Monitor M-080QA-HPM
- Compact Gas Analysis System D Series M-101/201/400GA-D Series
- High-speed/High-sensitivity Measurement M-401QA-MU/G
- Transducer Type M-070QA-TDF, M-101QA-TDF, M-101/201QA-TDM
Vacuum Gauges
Canon offers a variety of gauges, such as Capacitance Diaphragm, Pirani and Crystal Ion gauges. These products are capable of handling a wide range of atmospheric pressure down to 10-8 Pa. They are ideally suited for all types of industries, such as semiconductor and flat panel manufacturing.
Helium Leak Detectors (HELEN Series)
The HELEN series consists of compact, light-weight, portable design helium leak detectors, capable of detecting a wide range of leaks with a leak-rate from 10-13 Pa•m3/s to 10-3 Pa•m3/s.
We have several models, such as a compact version for use in the field, high power model for large vacuum systems, dry model for use in clean-rooms and sniffers for use in leak testing gas supply systems, automotive parts, food packages, etc.
Piping Parts/Ancillary Materials
Canon Anelva produces a range of essential piping parts and ancillary materials for vacuum systems used in thin film manufacturing, research laboratories, and industrial applications.
- Ultra-High Vacuum Flange
- Ultra-High Vacuum Viewing Port
- Vacuum Switch
- Quick-release Coupling
- Connecting Components with ICF (Fitting/Adaptor)
- Sheathed Heater
- Moly Paste 500
Valves
Canon Anelva offers a range of vacuum valves designed for various applications within vacuum systems. They are essential components in maintaining optimal pressure conditions, ensuring efficient vacuum processes.
Feed Throughs
Canon Anelva produces a variety of feed throughs that are essential components in vacuum systems.
- Linear Feedthrough (Bellows Type)
- Rotary Feedthrough (Magnetic Coupling Type, Bellows Type)
X-ray Source
Canon Anelva offers advanced X-ray sources for industrial non-destructive inspection. They are essential tools for quality control, material analysis, and defect detection in various industries.
- Microfocus X-ray Source G-311 Series
- Microfocus X-ray Source G-511 Series