Atomic Diffusion Bonding Equipment
Atomic Diffusion Bonding Equipment

Atomic Diffusion Bonding Equipment

Atomic Diffusion Bonding Equipment

Wafer Bonding Equipment

‍Ultra-high vacuum in-situ processes of wafer transfer, film deposition, bonding and bonded wafer collection with automatic operation.

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Key Features

BC7300/BC7000 is wafer bonding equipment that uses atomic diffusion bonding (ADB) technology, which utilises atomic diffusion of a sputtered bonding film on the bonding substrate surface.

ADB technology is possible at room temperature and without load force, regardless of wafer material.

Application

  • RF Filter
  • Power Devices
  • LED
  • MEMS

Features

  • Robust bonding at room temperature and without load force
  • Compatible with various substrate materials
  • Clean bonding interface through in-situ processing from bonding film deposition to wafer bonding
  • Adjustable bonding interface resistance

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  • 01. Prices, specifications, availability and terms of offers may change without notice.
  • 02. Products / Services may be manufactured by and/or supplied to us by third party manufacturers / suppliers for distribution / resale (non-Canon brand products).
  • 03. Prices above are recommended retail price in SGD and may change without prior notice.