Vacuum Components
Vacuum Components
Vacuum Components
Canon ANELVA's vacuum components are essential for thin film manufacturing, widely utilised across various industries and research laboratories for their reliability and performance.
Promotion
Key Features
Canon ANELVA's vacuum components are used by many companies and R&D laboratories engaged in thin film manufacturing as indispensable parts.
Vacuum Pumps
Canon ANELVA provides a variety of pumps, including world's highest energy efficient cryopumps, ion pumps and titanium sublimation pumps, for low vacuum to ultra-high vacuum applications.
- Roots Type MU Series for Light Process
- Roots Type Dry Pump MU100N/300
- Foreline Trap
- POWER Eco Series Cryo Pump
- POWER Series Cryo Pump
- Combination Pump
- Ion pump/Noble Pump
Quadrupole Mass Spectrometers
Canon ANELVA offers several models of Quadrupole Mass Spectrometers, each tailored for specific applications, such as residual gas monitoring, process gas analysis, and high-speed mass measurement.
They are widely used in analysis of gases in thin film processing equipment, furnaces and accelerators.
- Process Gas Monitor M-080QA-HPM
- Compact Gas Analysis System D Series M-101/201/400GA-D Series
- High-speed/High-sensitivity Measurement M-401QA-MU/G
- Transducer Type M-070QA-TDF, M-101QA-TDF, M-101/201QA-TDM
Vacuum Gauges
Canon offers a variety of gauges, such as Capacitance Diaphragm, Pirani and Crystal Ion gauges. These products are capable of handling a wide range of atmospheric pressure down to 10-8 Pa. They are ideally suited for all types of industries, such as semiconductor and flat panel manufacturing.
Helium Leak Detectors (HELEN Series)
The HELEN series consists of compact, light-weight, portable design helium leak detectors, capable of detecting a wide range of leaks with a leak-rate from 10-13 Pa•m³/s to 10-3 Pa•m³/s.
We have several models, such as a compact version for use in the field, high power model for large vacuum systems, dry model for use in clean-rooms and sniffers for use in leak testing gas supply systems, automotive parts, food packages, etc.
Vacuum Valves and Switches
Canon ANELVA offers a range of vacuum valves designed for various applications within vacuum systems. They are essential components in maintaining optimal pressure conditions, ensuring efficient vacuum processes.
X-Ray Sources
Canon ANELVA offers advanced X-ray sources for industrial non-destructive inspection. They are essential tools for quality control, material analysis, and defect detection in various industries.
- Microfocus X-ray Source G-311 Series
- Microfocus X-ray Source G-511 Series
Industrial Products Contact Us - Industrial Products Enquiry
Please fill out the form below.
Product Disclaimer
- 01. Prices, specifications, availability and terms of offers may change without notice.
- 02. Products / Services may be manufactured by and/or supplied to us by third party manufacturers / suppliers for distribution / resale (non-Canon brand products).
- 03. Prices above are recommended retail price in SGD and may change without prior notice.