Sputtering Equipment / Dry Etch
Sputtering Equipment / Dry Etch
Sputtering Equipment / Dry Etch
With the rapid advancement of generative AI, demand for semiconductor devices—especially those used in data centres—is increasing. Sputtering equipment supports semiconductor manufacturing by enabling high-quality, high-precision film deposition using advanced vacuum technologies.
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Key Features
What is Sputtering Equipment?
Sputtering equipment is used to form thin films on a wafer to create circuits for semiconductor devices. It is typically used in the production of Semiconductor devices, which are seeing growing demand in fields such as generative AI and the automotive industry.
The manufacturing process of semiconductor chips is divided into two stages: the front-end process, where electronic circuit patterns are formed on a wafer, and the back-end process, where the patterned wafer is cut into individual chips and assembled to function properly within electronic devices.
Among the various semiconductor manufacturing systems, sputtering equipment is primarily used in the front-end process to deposit thin films onto the wafer. A single semiconductor chip may contain over thirty layers of film, with each layer requiring highly precise deposition technology—some as thin as 1 nanometer (nm), which is one-billionth of a meter.
Front-End Processing
Back-End Processing
Adastra: Winner of the 2024 Good Design Gold Award
Adastra is a sputtering system that offers flexible configuration options tailored to the semiconductor devices being produced, allowing it to meet a wide range of needs. In the semiconductor industry, where both productivity and environmental considerations are essential, Adastra enables nano-level thin film deposition while minimising space and energy consumption.
Its design and usability have been highly praised, earning it the Gold Award in Japan's 2024 Good Design Awards and the top prize (Minister of Economy, Trade and Industry Award) at the 55th IDEA Machine Industry Design Awards. Internationally, it also received the Gold Award at Germany's 2025 iF Design Awards in recognition of both its technological excellence and design quality.
Adastra Sputtering Equipment Series
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