Typical multi-chamber cluster-type PVD equipment can deposit only one kind of material per film deposition chamber, and accordingly requires as many deposition chambers as the materials needed. The SC7000 is a compact multifunctional PVD equipment developed to allow as many as three materials to be deposited in a single film deposition chamber.
The cathode concept of this equipment takes advantage of our original technologies similar to C-3530
Depending on the production scale and application, the SC7000 series is available as a single type SC7000 with one film deposition chamber and a as dual type SC7000 with two film deposition chambers
All prices above are recommended retail price in SGD, unless otherwise stated.