FPA-3030i5+
  • Resolution: ≤ 0.35µm
  • Numerical aperture: 0.45 - 0.63
  • Wafer size: 200mm, 150mm
FPA-6300ES6a
  • Resolution: ≤ 90 nm
  • Numerical aperture: 0.50 - 0.86
  • Wafer size: 300mm, 200mm